Heater
Ceramic Heater - Process Flow
1Heating Element
2Ceramic Material
3Sintering
4Diffusion Bond
5Brazing
6Machining
7Cleaning
- Excellent thermal uniformity
- 100% in-house process control
- Heater dedicated tools/systems (KSM design)
- Qualified special processes
1 Heating Element
Precise pitch control
KSM Patented High-precision Heating Element
- Excellent Thermal Uniformity
- KSM Patented Design / Auto-Process
- Optimum Lay-out for : Flatness , Consistent Positioning (R&R)
2Ceramic Material
Qualified Material Process
- State-of-Art Process Control
- KSM Patented Material Recipes
- Consistent Ceramic Properties
3Heating Element
KSM Patented Sintering Process
- Field Proven Sintering Quality
- KSM Designed Mold Technology
- Precise RF Mesh Flatness
4Diffusion Bond
KSM Developed Diffusion Bond Technology
- World No.1 Diffusion Bonding Technology
- High Productivity with Short Cycle
- KSM Designed Bonding System
5Brazing
Qualified Electrode Brazing
- AWS/ASTM Qualified Brazing Process
- Oxygen-free Braze with KSM Designed Furnace
- KSM Patented Robust Brazing Structure
6Machining
Qualified Machining for Ceramic
- Customer Qualified Special Process
- Auto Tool Changer & Tool Life Control
- Paperless Operation : Linked with SPC System
- High Performance MCT & Multi-Axis Tools
7Cleaning
Fully Automated Cleaning Facility (CLASS 1000)
- Heater Dedicated Cleaning Facility (7,500ft2)
- Ceramic/Metal Separated Lines : Fully Automated
- Cleaning + Packaging One-pass (CLASS 1000 Environment)